13 research outputs found
A neural probe with up to 966 electrodes and up to 384 configurable channels in 0.13 μm SOI CMOS
In vivo recording of neural action-potential and local-field-potential signals requires the use of high-resolution penetrating probes. Several international initiatives to better understand the brain are driving technology efforts towards maximizing the number of recording sites while minimizing the neural probe dimensions. We designed and fabricated (0.13-μm SOI Al CMOS) a 384-channel configurable neural probe for large-scale in vivo recording of neural signals. Up to 966 selectable active electrodes were integrated along an implantable shank (70 μm wide, 10 mm long, 20 μm thick), achieving a crosstalk of −64.4 dB. The probe base (5 × 9 mm2) implements dual-band recording and a 1
Time Multiplexed Active Neural Probe with 1356 Parallel Recording Sites
We present a high electrode density and high channel count CMOS (complementary metal-oxide-semiconductor) active neural probe containing 1344 neuron sized recording pixels (20 µm × 20 µm) and 12 reference pixels (20 µm × 80 µm), densely packed on a 50 µm thick, 100 µm wide, and 8 mm long shank. The active electrodes or pixels consist of dedicated in-situ circuits for signal source amplification, which are directly located under each electrode. The probe supports the simultaneous recording of all 1356 electrodes with sufficient signal to noise ratio for typical neuroscience applications. For enhanced performance, further noise reduction can be achieved while using half of the electrodes (678). Both of these numbers considerably surpass the state-of-the art active neural probes in both electrode count and number of recording channels. The measured input referred noise in the action potential band is 12.4 µVrms, while using 678 electrodes, with just 3 µW power dissipation per pixel and 45 µW per read-out channel (including data transmission)
NANOTRIBOLOGICAL AND NANOMECHANICAL CHARACTERIZATIONS OF MEMS MATERIALS
FIRST Post-Doc n° 616365 (MOMIVAL
Photoacoustic raster scan imaging using an optomechanical ultrasound sensor in silicon photonics
Photoacoustic tomography defines new challenges for ultrasound detection compared to ultrasonography. To address these challenges, a sensitive, small, scalable, and broadband optomechanical ultrasound sensor (OMUS) has been developed. The OMUS is an on-chip optical ultrasound sensor, using optical interferometric ultrasound detection. It consists of an acoustic membrane on top of an optical ring resonator that modulates the optical ring resonance with high efficiency enabled by an innovative optomechanical waveguide. Raster scanning photoacoustic tomography has been demonstrated with a single-element OMUS. Based on performance and form factor, the OMUS combined with passive optical multiplexing may enable new applications in photoacoustic imaging.</p
Design of a micro-opto-mechanical ultrasound sensor for photoacoustic imaging
Optical ultrasound sensing is a promising technique for
the emerging field of biomedical photoacoustic imaging.
Previously at imec, micro-opto-mechanical sensors with
integrated Mach-Zehnder interferometers were designed
and demonstrated as highly sensitive for static pressure
sensing. At quasi-static pressures, they are demonstrated to
operate as a sensitive microphone. In this study, the
application range is extended to include dynamic pressures
targeting a proof of concept for a photoacoustic imaging
application. To achieve this, the dynamic behavior of the
pressure sensor is firstly characterized, showing its
resonance frequency at 73.8 kHz. Since this is below the
range desired in photoacoustic imaging, several
approaches for resonance frequency increase are
investigated, resulting positively for incomplete membrane
release and new designs. These approaches are analyzed
based on the evaluated sensor sensitivity, allowing the
selection of optimal design. The mentioned evaluation of
sensor sensitivity is possible due to a developed
methodology based on measurement data, analytical and
accurate acousto-mechanical finite element models. The
developed methodology is demonstrated throughout a
range of membrane sizes, frequencies and modes of
vibration allowing the selection of maximum sensitivity
design. In this study, a micro-opto-mechanical ultrasound
sensor based on integrated Mach-Zehnder interferometer is
designed for 1 MHz operation in a photoacoustic imaging
environment and optimized for sensitivity.status: publishe
Photoacoustic raster scan imaging using an optomechanical ultrasound sensor in silicon photonics
Photoacoustic tomography defines new challenges for ultrasound detection compared to ultrasonography. To address these challenges, a sensitive, small, scalable, and broadband optomechanical ultrasound sensor (OMUS) has been developed. The OMUS is an on-chip optical ultrasound sensor, using optical interferometric ultrasound detection. It consists of an acoustic membrane on top of an optical ring resonator that modulates the optical ring resonance with high efficiency enabled by an innovative optomechanical waveguide. Raster scanning photoacoustic tomography has been demonstrated with a single-element OMUS. Based on performance and form factor, the OMUS combined with passive optical multiplexing may enable new applications in photoacoustic imaging.Micro-optics and Optomechatronic
Sensitive optomechanical ultrasound sensor in a silicon photonic chip towards single-shot photoacoustic imaging with an ultrasound sensor matrix
We propose a new opto-mechanical ultrasound sensor (OMUS) enabled by an innovative silicon photonics waveguide. We present experimental results up to 30 MHz, a 10-sensor array proof-of-concept and our latest findings